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                                                        | Equipment | Automatic Dicing Saw |  
                                                        | Maker | Disco |  
                                                        | Model | DAD 560 |  
                                                        | Status | Excellent |  
                                                        | Location | In Factory |  
                                                        | Application | Dicing/Cutting/Slotting various wafers |  |  |  
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  | ºÐ·ù | Ç׸ñ | »ç¾ç | ´ÜÀ§ |  
  | Workpiece size | ©ª152.4 | (mm) |  
  | X-axis | Useable stroke | 220 | (mm) |  
  | Cut speed | 0.04~300.00 | (mm/s) |  
  | Bearing type | Air guide | ¡¡ |  
  | Y-axis | Useable stroke | 160 | (mm) |  
  | Indexing step range | 0.0001 to 160.0000 | (mm) |  
  | Position accuracy (cumulative pitch) | less than 0.002/160 | (mm) |  
  | Position accuracy (single pitch) | less than 0.001/5 | (mm) |  
  | Bearing type | Linear guide | ¡¡ |  
  | Z-axis | Maximum cutting
  stroke | 33 | (mm) |  
  | Minimum step | 0.0005 | (mm) |  
  | Repeating accuracy | 0.001/5 | (mm) |  
  | Maximum blade size | 76.2 | (mm) |  
  | ¥È-axis | Rotation Range | 0 to 130 | (deg) |  
  | Spindle | Output | 1.5 | (kW) |  
  | Maximum revolution | 30,000 | (min-1[rpm]) |  
  | Applicable Tape Frame | MAX 2-6-1 | ¡¡ |  
  | Utilities | Power supply | 3Phase 200V | ¡¡ |  
  | 50-60Hz | ¡¡ |  
  | Power consumption |  
  | When processing | 0.59 | (kW) |  
  | During warm-up | 0.51 | (kW) |  
  | Maximum power | 3 | (kVA) |  
  | Air pressure | 0.5~0.8[5.0~8.0] | (MPa[kgf/cm2]) |  
  | Air flow rate | 250 | (L/min(ANR)) |  
  | Water pressure | 0.2~0.4[2~4] | (MPa[kgf/cm2]) |  
  | Water flow rate |  
  | Cutting water | 5.0 maximum | (L/min) |  
  | Cooling water | more than 2.5 | (L/min) |  
  | Duct required suction | 2.5~5 | (m3/min) |  
  | Machine size | 796W x 850D x 1,615H | (mm) |  
  | ¡¡ | (including monitor) | 31.3W x 33.5D x 63.6H | (inch) |  
  | Machine weight | 570 | (kg) |  |  |  
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