◆ X - axis Section
Drive Method	AC Servo Motor
Stroke	650mm Max
Effective Cut Stroke	220mm
Cut Speed	0.7~3000mm/sec
◆ Y - axis Section
Drive Method	Pulse Motor
Max Programmable Stroke	220mm
Index Speed	30mm/sec
Indexing Method Min Index Step	Linear Scale Closed Loop System 0.001mm
Indexing Accuracy	Single Pitch 0.003mm Cumulative Pitch 0.005mm/200mm
◆ Z - axis Section
Drive Method	Pulse Motor
Indexing Method	Rotary Encorder
Max Stroke	25mm
Min Index	0.002mm
◆ Θ - axis Section
Drive Method	AC Servo Motor
Rotation Angle (end to end)	150 ˚ max
Indexing Time	2sec/90˚
Min Index Angle	1.62"
◆ Spindle Section (High Frequency Air Spindle)
Output	800W
RPM	3,000 ~ 60,000
◆ Spinner Section
Drive Method	AC Direct Drive
RPM	3,000rpm MAX
Wash/dry Time	999 Seconds Max
Wash → Rinse → Dry	Programmable
Accuracy of Table Positioning During Rotation	± 1 ˚
◆ Alignment Section
Alignment Method	CCD Camera Pattern Matching System
Microscope	Single Object Magnfication (a b Selectable)   Macro Micro a 2.66 X 7.5 X b 7.08 X 19.88 X With Auto Focus Mechanism
◆ Handling Section
Loading/Unloading Section	Cross-Flow Arm System
Number of Cassettes Used (Detting for pitch and Number of Workpieces Can Be Changed)	Number of Cassettes 1 for Each Loader/Unloader 8"Φ=1/4" , 26 Slots 3~6" Φ = 3/16" , 25 Slots
◆ Utilities
power Supply
(1) AC 200/220 V	3 Phase 50/60 Hz (domestic) 5 KVA
(2) AC 200 ~ 415V*	3 Phase 50/60 Hz (Overseas) 5 KVA Transformer Necessary
◆ Water Pressure
Cooling Water (tap Water)	2Kg/㎠ 1.5 Liters/Min
Cutting Water (D.I Water)	3 kg/㎠ 5 Liters/Min
Air Pressure	5.5kgf/㎠ ㆍG 440 Liters/Min
N	5.5kgf/㎠ ㆍG - AT Max. use 565 liters/min