제품에 대한 구입문의 또는 자세한 정보를 원하시는 분은 제품문의를 클릭하시고 내용을 입력해 주시면 빠른 시간 내에 답변드리도록 하겠습니다.

 

Equipment

Fully Automatic Dicing Saw

Maker

Disco

Model

DFD-2S/8

Status

Excellent

Location

In Factory

Application

Dicing/Cutting/Slotting various wafers

 

◆ X - axis Section
Drive Method AC Servo Motor
Stroke 650mm Max
Effective Cut Stroke 220mm
Cut Speed 0.7~3000mm/sec
◆ Y - axis Section
Drive Method Pulse Motor
Max Programmable Stroke 220mm
Index Speed 30mm/sec
Indexing Method
Min Index Step
Linear Scale Closed Loop System
0.001mm
Indexing Accuracy Single Pitch 0.003mm
Cumulative Pitch 0.005mm/200mm
◆ Z - axis Section
Drive Method Pulse Motor
Indexing Method Rotary Encorder
Max Stroke 25mm
Min Index 0.002mm
◆ Θ - axis Section
Drive Method AC Servo Motor
Rotation Angle (end to end) 150 ˚ max
Indexing Time 2sec/90˚
Min Index Angle 1.62"
◆ Spindle Section (High Frequency Air Spindle)
Output 800W
RPM 3,000 ~ 60,000
◆ Spinner Section
Drive Method AC Direct Drive
RPM 3,000rpm MAX
Wash/dry Time 999 Seconds Max
Wash → Rinse → Dry Programmable
Accuracy of Table Positioning
During Rotation
± 1 ˚
◆ Alignment Section
Alignment Method CCD Camera Pattern Matching System
Microscope Single Object Magnfication
(a b Selectable)
  Macro Micro
a 2.66 X 7.5 X
b 7.08 X 19.88 X

With Auto Focus Mechanism
◆ Handling Section
Loading/Unloading Section Cross-Flow Arm System
Number of Cassettes Used
(Detting for pitch and Number of Workpieces Can Be Changed)
Number of Cassettes 1 for Each Loader/Unloader
8"Φ=1/4" , 26 Slots
3~6" Φ = 3/16" , 25 Slots
◆ Utilities
power Supply  
(1) AC 200/220 V 3 Phase 50/60 Hz (domestic) 5 KVA
(2) AC 200 ~ 415V* 3 Phase 50/60 Hz (Overseas) 5 KVA
Transformer Necessary
◆ Water Pressure
Cooling Water (tap Water) 2Kg/㎠ 1.5 Liters/Min
Cutting Water (D.I Water) 3 kg/㎠ 5 Liters/Min
Air Pressure 5.5kgf/㎠ ㆍG 440 Liters/Min
N 5.5kgf/㎠ ㆍG - AT Max.
use 565 liters/min

 


 

Dicing/Slicing Saws

Back-end & Assembly

Microscope & Metrology

Others

Wanted Used Equipment