제품에 대한 구입문의 또는 자세한 정보를 원하시는 분은 제품문의를 클릭하시고 내용을 입력해 주시면 빠른 시간 내에 답변드리도록 하겠습니다.

 

Equipment

Fully Automatic Dicing Saw

Maker

Disco

Model

DFD-3D/8

Status

Excellent

Location

In Factory

Application

Dicing/Cutting/Slotting various wafers

 

X - axis Section
Drive Method AC Servo Motor-ball Screw
Minimum Stroke 652mm (25.7") (end to end)
Set-up Cut Stroke 220mm (8.7")
Cut Speed 0.7~3000mm/sec (0.0028 to 11.8" /sec)
(Programmable)
Y - axis Section
Drive Method AC Servo Motor-ball Screw
Maximum Stroke 250mm(9.8") (end to end)
Set-up Cut Stroke 200mm(8.7")
Min Index Step 0.001mm (0.00004")
Single Pitch Error ≤0.003mm(0.00012")
Cumulative Pitch Error ±0.005mm/200mm (±0.0002"/7.9")or less
The Zero Point Position ±0.001mm(±0.00004")
Index Speed 30mm/sec
Indexing Method Linear Scale Closed Loop System
Indexing Accuracy Single Pitch 0.003mm
Cumulative Pitch 0.005mm/200mm
y - axis Section
Drive Method Pulse Motor-Triangular Screw
Maximum Stroke 25mm(0.98")
Minimum Step

0.001mm(0.00004")

Indexing Method Linear Scale Closed Loop System
Z - axis Section (Z1,Z2-axis : DFD-3D/8, Z1-axis : DFD-3S/8)
Drive Method Pulse Motor-ball Screw
Maximum Stroke 25mm(0.98")
Minimum Step 0.001mm(0.00004")
Indexing Method Rotary Encorder
Θ - axis Section
Drive Method AC Servo Motor-harmonic Gear
Rotation Angle (end to end) 150 ˚ (end to end)
Accuracy of Determining a Position ±2sec
Min Index Angle 1.62"
Spindle Section
Method High Frequency Air Spindle
Output 2.2kW
RPM 3,000 ~ 40,000 (Programmable)
Spinner Section (DFD-3D/8 ,3S/8)
Wash Method High-pressure jet spinner washing system
Dry Method Air (N2) or Spinner Rotation System
Drive Method AC Servo Motor-Direct Drive
RPM 3,000 rpm MAX
Process Wash → Rinse → Dry
Wash/dry Time 600 Sec Maximum
Accuracy of Table Positioning
During Rotation
± 1 ˚
Alignment Section
Alignment Method CCD Camera Pattern Matching System
(DFD-3D/8 , 3S/8)
Microscope Single Object Magnfication
(a b Selectable)
  Macro Micro Objective lens
a 2.66 X 7.5 X 1.4 X D
b 7.08 X 19.88 X 3.8 X D

With Auto Focus Mechanism
Handling Section
Method Combination of Cross-flow Robot Arm Systemand Cassette Elevator
Application Frames 2
Cassette Pitch 1/4" or 3/16"
Supply
Power 3 Phase 50/60 Hz, AC 200/220 V, 5 KVA
(AC 200 ~ 415V Transformer Necessary)
Cooling Water (tap Water) 2Kg/㎠ㆍG 4.5 Liters/Min
(28.4 psiㆍG1.19 gpm)
D.I Water (Cutting/Washing) 4Kg/㎠ㆍG 9 Liters/Min
(56.8 psiㆍG 2.38 gpm)
Air Pressure 5.5kgf/㎠ ㆍG 600 Liters/Min
(78.1 psiㆍG 158 gpm)
N2 5.5kgf/㎠ ㆍG 150 Liters/Min
(78.1 psiㆍG 39.6 gpm)
Machine Size (WxDxH) 1,830 x 1,100 x 1,655mm (72x43x65")
including monitor but excluding projection
Machine Weight 1500kg (3370 lbs)

 


 

Dicing/Slicing Saws

Back-end & Assembly

Microscope & Metrology

Others

Wanted Used Equipment