| ◆
X - axis Section
|
| Drive Method |
AC Servo Motor-ball Screw |
| Minimum Stroke |
652mm (25.7") (end to
end) |
| Set-up Cut
Stroke |
220mm (8.7") |
| Cut Speed |
0.7~3000mm/sec (0.0028 to 11.8"
/sec)
(Programmable) |
| ◆
Y - axis Section |
| Drive Method |
AC Servo Motor-ball Screw |
| Maximum Stroke |
250mm(9.8") (end to end) |
| Set-up Cut
Stroke |
200mm(8.7") |
| Min Index
Step |
0.001mm (0.00004") |
| Single Pitch
Error |
≤0.003mm(0.00012") |
| Cumulative
Pitch Error |
±0.005mm/200mm (±0.0002"/7.9")or
less |
| The Zero
Point Position |
±0.001mm(±0.00004") |
| Index Speed |
30mm/sec |
| Indexing
Method |
Linear Scale Closed Loop System
|
| Indexing
Accuracy |
Single Pitch 0.003mm
Cumulative Pitch 0.005mm/200mm |
| ◆
y - axis Section |
| Drive Method |
Pulse Motor-Triangular Screw |
| Maximum Stroke |
25mm(0.98") |
| Minimum Step |
0.001mm(0.00004")
|
| Indexing
Method |
Linear Scale Closed Loop System
|
| ◆
Z - axis Section (Z1,Z2-axis
: DFD-3D/8, Z1-axis : DFD-3S/8) |
| Drive Method |
Pulse Motor-ball Screw |
| Maximum Stroke |
25mm(0.98") |
| Minimum Step |
0.001mm(0.00004") |
| Indexing
Method |
Rotary Encorder |
| ◆
Θ - axis Section |
| Drive Method |
AC Servo Motor-harmonic Gear |
| Rotation
Angle (end to end) |
150 ˚ (end to end) |
| Accuracy
of Determining a Position |
±2sec |
| Min Index
Angle |
1.62" |
| ◆
Spindle Section |
| Method |
High
Frequency Air Spindle |
| Output |
2.2kW |
| RPM |
3,000 ~ 40,000 (Programmable) |
| ◆
Spinner Section (DFD-3D/8 ,3S/8) |
| Wash Method |
High-pressure jet spinner washing
system |
| Dry Method |
Air (N2)
or Spinner Rotation System |
| Drive Method |
AC Servo Motor-Direct Drive |
| RPM |
3,000 rpm MAX |
| Process |
Wash → Rinse → Dry |
| Wash/dry
Time |
600 Sec Maximum |
Accuracy
of Table Positioning
During Rotation |
± 1 ˚ |
| ◆
Alignment Section |
| Alignment
Method |
CCD Camera Pattern Matching
System
(DFD-3D/8 , 3S/8) |
| Microscope |
Single Object Magnfication
(a b Selectable)
| |
Macro |
Micro |
Objective lens |
| a |
2.66 X |
7.5 X |
1.4 X D |
| b |
7.08 X |
19.88 X |
3.8 X D |
With Auto Focus Mechanism |
| ◆
Handling Section |
| Method |
Combination of Cross-flow Robot
Arm Systemand Cassette Elevator |
| Application
Frames |
2 |
| Cassette
Pitch |
1/4" or 3/16" |
| ◆
Supply |
| Power |
3 Phase 50/60 Hz, AC 200/220
V, 5 KVA
(AC 200 ~ 415V Transformer Necessary) |
| Cooling Water
(tap Water) |
2Kg/㎠ㆍG 4.5 Liters/Min
(28.4 psiㆍG1.19 gpm) |
| D.I Water
(Cutting/Washing) |
4Kg/㎠ㆍG 9 Liters/Min
(56.8 psiㆍG 2.38 gpm) |
| Air Pressure |
5.5kgf/㎠ ㆍG 600 Liters/Min
(78.1 psiㆍG 158 gpm) |
| N2 |
5.5kgf/㎠ ㆍG 150 Liters/Min
(78.1 psiㆍG 39.6 gpm) |
| Machine Size
(WxDxH) |
1,830 x 1,100 x 1,655mm (72x43x65")
including monitor but excluding projection |
| Machine Weight |
1500kg (3370 lbs) |
