Á¦Ç°¿¡ ´ëÇÑ ±¸ÀÔ¹®ÀÇ ¶Ç´Â ÀÚ¼¼ÇÑ Á¤º¸¸¦ ¿øÇϽô ºÐÀº Á¦Ç°¹®ÀǸ¦ Ŭ¸¯ÇÏ½Ã°í ³»¿ëÀ» ÀÔ·ÂÇØ ÁÖ½Ã¸é ºü¸¥ ½Ã°£ ³»¿¡ ´äº¯µå¸®µµ·Ï ÇÏ°Ú½À´Ï´Ù.

 

Equipment

Automatic Dicing Saw

Maker

Disco

Model

DAD 521

Status

Excellent

Location

In Factory

Application

Dicing/Cutting/Slotting various wafers

 

Á¦¸ñ ¾øÀ½

Workpiece size

©ª152.4

(mm)

X-axis

Useable stroke

220

(mm)

Cut speed

0.3~300.0

(mm/s)

Bearing type

Ball Bearing(Linear guide)

¡¡

Y-axis

Useable stroke

160

(mm)

Indexing step

0.0001

(mm)

Position accuracy (cumulative pitch error)

less than 0.005/160

(mm)

Position accuracy (single pitch error)

less than 0.003/5

(mm)

Bearing type

Linear guide

¡¡

Z-axis

Maximum cutting stroke

33

(mm)

Minimum step

0.0001

(mm)

Repeating accuracy

0.001/5

(mm)

Maximum blade size

76.2

(mm)

¥È-axis

Rotation angle (max.)

380

(deg)

Spindle

Output

1.5

(kW)

Maximum revolution

30,000

(min-1[rpm])

Applicable Tape Frame

MAX 2-6-1

¡¡

Utilities

Power supply

3Phase 200V 50-60Hz

¡¡

Power consumption

2.5

(kVA)

Air pressure

0.49~0.78[5.0~8.0]

(MPa[kgf/cm2])

Air flow rate

200

(Nl/min(ANR))

Water pressure

0.2~0.39[2~4]

(MPa[kgf/cm2])

Water flow rate

5

¡¡

  Cutting water

0.2~2.0

(L/min)

  Cooling water

more than 1.5

(L/min)

Duct required suction

2.5~5

(m3/min)

Machine size

760W x 850D x 1,510H

(mm)

Machine weight

670

(kg)

 


 

Dicing/Slicing Saws

Back-end & Assembly

Microscope & Metrology

Others

Wanted Used Equipment