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Equipment

Automatic Dicing Saw

Maker

Disco

Model

DAD 320

Status

Excellent

Location

In Factory

Application

Dicing/Cutting/Slotting various wafers

 

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Workpiece size

160 x 160

(mm)

X-axis

Useable stroke

192

(mm)
Cut speed

0.13 ~ 300

(mm/s)

Y-axis

Useable stroke

162

(mm)
Indexing step

0.0002

(mm)
Position accuracy (cumulative pitch)

less than 0.005/160

(mm)
Position accuracy (single pitch)

less than 0.003/5

(mm)
Scale resolution

-

(mm)

Z-axis

Maximum cutting stroke

28.2 (for ©ª2"blade) *

(mm)
Minimum step

0.0001

(mm)
Repeating accuracy

0.001

(mm)
Maximum blade size

76.2

(mm)

¥È-axis

Rotation angle (max.)

380

(deg)

Spindle

Output

1.5

(kW)
Maximum revolution

40,000

(min-1[rpm])
Applicable Tape Frame

MAX 2-6-1

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Utilities Power supply

3Phase 200V

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50-60Hz

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Power consumption
  When processing

0.6

(kW)
  During warm-up

0.5

(kW)
Maximum power

3.5

(kVA)
Air pressure(Not including Airgun)

0.5 ~ 0.6[5.0~6.0]

(MPa[kgf/cm2])
Air flow rate(Not including Airgun)

162

(L/min(ANR))
Water pressure

0.3[3.0]

(MPa[kgf/cm2])
Water flow rate
  Cutting water

0.2 ~ 4.0

(L/min)
  Cooling water

1.5

(L/min)
Duct required suction

1.5

(m3/min)
Apperance Machine size

500W x 1,050D x 1,455H

(mm)
Machine weight

500

(kg)
  *: ©ª2" = 55.56mm is assumed.

A reference value only.

 


 

Dicing/Slicing Saws

Back-end & Assembly

Microscope & Metrology

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