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Equipment

Semi Automatic Dicing Saw

Maker

Disco

Model

DAD381

Status

Excellent

Location

In Factory

Application

Dicing for 12 inch

 

DAD-381 Specification
Axis/Block Item Spec Unit
Workpiece size 304.8 x 304.8 (mm)
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X-axis
Useable stroke 394 (mm)
Cut speed 0.1 ~ 400 (mm/s)
Y-axis Useable stroke 310 (mm)
Indexing step 0.0001 (mm)
Position accuracy (cumulative pitch) less than 0.005/310 (mm)
Position accuracy (single pitch) less than 0.003 (mm)
Scale resolution 0.0001 (mm)
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Z-axis
Maximum cutting stroke 30.2 (for ©ª2"blade)  (mm)
Minimum step 0.0001 (mm)
Repeating accuracy 0.001 (mm)
Maximum blade size 76.2 (mm)
  ¥È-axis Rotation angle (max.) 380 (deg)
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Spindle
Output 1 (kW)
Maximum revolution 60,000 (min-1[rpm])
Rated torque 0.16 (N¡¤m)
Revolution speed range 6,000 - 60,000  (min-1)
Applicable Tape Frame ©ª12-inch Wafer Frame ¡¡
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Utilities
Power supply 3Phase 200V ¡¡
50-60Hz ¡¡
Power consumption
  When processing 0.6 (kW)
  During warm-up 0.5 (kW)
Maximum power 3.5 (kVA)
Air pressure(Not including Airgun) 0.5 ~ 0.6[5.0~6.0] (MPa[kgf/cm2])
Air flow rate(Not including Airgun) 162 (L/min(ANR))
Water pressure 0.3[3.0] (MPa[kgf/cm2])
Water flow rate
  Cutting water 0.2 ~ 2.5 (L/min)
  Cooling water 1.5 (L/min)
Duct required suction 5 (m3/min)
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Apperance
Machine size 1,028W x 1,550D x 1,235H (mm)
Machine weight 1200 (kg)

 


 

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