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Equipment
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Automatic Dicing Saw
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Maker
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Disco
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Model
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DAD-2H/6T
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Status
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Excellent
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Location
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In Factory
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Application
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Dicing/Cutting/Slotting various wafers
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¡ß Workpiece size
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©ª160.4
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(mm)
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X-axis
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stroke
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330max
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(mm)
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Cut speed
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0.04 300.0
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(mm/s)
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Guide and driving method
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Air guide,DC servomotor drive,belt feed
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Y-axis
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Useable stroke
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164
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(mm)
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Indexing step
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0.0005
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(mm)
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Position accuracy
(cumulative pitch)
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less than 0.003/160
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(mm)
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Position accuracy
(single pitch)
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less than 0.003/5
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(mm)
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Bearing type
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Linear guide
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Z-axis
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Maximum cutting stroke
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26.7 (for ©ª2"blade) *
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(mm)
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Minimum step
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0.0001
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(mm)
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Repeating accuracy
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0.001/5
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(mm)
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Maximum blade size
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76.2
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(mm)
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-axis
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Rotation angle (max.)
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150
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(deg)
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Spindle
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Output
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1.5
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(kW)
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Maximum revolution
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40,000
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(min-1[rpm])
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¡ß
Applicable Tape Frame
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MAX 2-6-1
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Utilities
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Power supply
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3Phase 200V
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50-60Hz
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¡ß
Power consumption 3kVA
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When processing
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0.64
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(kW)
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During warm-up
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0.52
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(kW)
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Maximum power
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3.50
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(kVA)
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Air pressure
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0.5 0.8[5.0 8.0]
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(MPa[kgf/cm2])
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Air flow rate
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216
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(L/min(ANR))
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Water pressure
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0.2 0.4[2.0 4.0]
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(MPa[kgf/cm2])
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¡ß
Water flow rate
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Cutting water
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0.2 4.0
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(L/min)
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Cooling water
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more than 1.5
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(L/min)
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Duct required suction
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2.5 5
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(m3/min)
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Machine size
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1045 x 1085 x1510H
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(mm)
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Machine weight
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535
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(kg)
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*: ©ª2" = 55.56mm is assumed. A reference value
only.
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