- High Rigidity, High Flatness
- Table Motion : Rotational Motion
- Stable Repeatability : less than 5%
- Work Clamp : Rotation Guide
- Workpiece : Max 6"
- Table Size : 380mm
- Slurry Spray : 500 rpm
- Machine Size : 900(W)mm X 1,200(D)mm X 1,300(H)mm
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