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CMP Glass Wafer 특성

물리적 성질

Density(ρ)

@25°C

2.22 g/cm3

Young's Modulus (E)

 @25°C

63 GPa

Knoop Hardness (HK 0.1/2.0)

per ISO 9385

480

Poisson's Ratio (μ)

-

0.20

Bending Strength

per DIN 52292

25 N/mm2

전기적 성질

Dielectric Constant (κ)

1 Mhz @ 25°C

4.6

Dielectric Loss Factor (tan δ)

1 Mhz @ 25°C

37 x 10-4

 Dieletric Strength (κ′)

23°C

16kV/mm

149°C

7kV/mm

160°C

1.8kV/mm

Volume Resistivity (log ρ)  

250°C

8.0

350°C

6.5

화학적 성질

Common Reactants  Weight Loss mg/cm2

0.02 n NaOH, 6 hr @ 95° C

0.16

0.02 n H2SO4, 24 hr @ 95° C

< 0.01

H2O, 24 hr @ 95° C

< 0.01

5% NaOH, 6 hr @ 95° C

1.1

5% HCl, 24 hr @ 95° C

< 0.01

0.02 Na2CO3, 6 hr @ 95° C

0.16

10% HF, 20 min @ 23° C

1.1

10% NH4F*HF, 20 min @ 23° C

0.14

 

 

Glass Name

Working Temp

Max Temp

Thermalshock Resistmc

Normal Sodalime

220

250

170

Pyrex

430

490

304

 

Chemical Composition of Borofloat 33 and Pyrex (Corning7740)

 

SiO2

B2O3

Na2O3

K2O

Al2O3

Borofloat33

80

13

3.5

1

2.5

Pyrex

81

13

4

-

2

 

Physical Properties of Borofloat 33 and Pyrex (Corning7740)

Properties

Borofloat33

Pyrex

Density(g/cm3)

2.2

2.2

Transformation Temperature in ° C

525

528

Strain Point T (log h=14.5)

619

-

Softening Point T (log h=7.8)

820

-

Working Point T (log h=4.0)

1270

1270

Maximum Use Temperature in ° C
Short term/Long Term 

500/450

290/260

Transform Temperature in ° C

630

-

Linear thermal expansion Coefficient α in ° C

3.25 X 10E-8

3.25 X 10E-8


 

Sodalime 특성

Specific Gravity

2.53

-

Modulus of Elasticity (Young's)

7.2x1010 Pa

(10.4x106 psi)

Modulus of Rigidity (Shear)

3.0x1010 Pa

(4.3 x 106 psi)

Bulk Modulus

4.3x1010 Pa

(6.18 x 106 psi)

Poisson's Ration

0.23

-

Density 

2530 kg/m3 (2.47 g/cc)

(158 ib/ft3)

Coefficient of Thermal Stress

0.62 mPa/° C

(50 psi/° F )

Thermal Conductivity

0.937 W.m/m2 ° C

(6.5 btu.in/hr° F.ft2)

Specific Heat

0.21

-

Coefficient of Linear Expansion

8.9 x 10-6 strain/° C

(4.9 X 10-6 strain/° F)

Hardness (Moh's Scale)

5 to 6

-

Refractive Index (Sodium D line)

1.523

-

(1um)

1.511

-

(2um)

1.499

-

Softening Point 

1340 ° F (726° C)

-

Annealing Point

1015 ° F (546° C)

-

Strain Point

957 ° F (473 ° C)

-

Emissivity at 75 ° F

0.84

-

Loss Tangent %

0.900

-

Volume Resistivity ohm.cm 250° C

6.40

-

 

 

Glass Name

Working Temp

Max Temp

Thermalshock Resistmc

Normal Sodalime

220

250

170

Pyrex

430

490

304


 

Corning 1737 특성

Mechanical

Metric

English

Density(20℃,68℉)

2.54g/㎤

158.6lb/ft3

Young's Modulus

7.14*103kg/㎟

10.15*106psi

Poisson's Ratio

0.22

0.22

Shear Modulus

2.88*103kg/㎟

4.1*106psi

Viscosity

WorkingPoint(104poises)

1312℃

2394℉

SofteningPoint(107.6 poises)

975℃

1787℉

Annealing Point(1013poises)

721℃

1330℉

Strain Point (1014.5 poises)

666℃

1231℉

Thermal Expansion

Expansion

37.6*10-7/℃

21*10-7/℉

Room Temperature to setting Point

42.0*10-7/℃

23.3*10-7/℉

Optical

Birefringence Constant

333nm/cm kg/㎟

-

Electrical

Log10 Volume Resistivity

(250℃,428℉)-13.5

 (350℃.662℉)-11.4

-

(500℃,932℉)-9.3

-

 

Refractive Index

Wavelength (nm)

435.8

480

486.1

546.1

589.3

643.8

656.3

Index of Refraction

1.529

1.525

1.5244

1.5207

1.5186

1.5166

1.516

 

 


 

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