|
|
CMP Glass Wafer
특성
|
|
|
|
물리적
성질
|
Density(ρ)
|
@25°C
|
2.22
g/cm3
|
|
Young's
Modulus
(E)
|
@25°C
|
63
GPa
|
|
Knoop
Hardness
(HK
0.1/2.0)
|
per
ISO
9385
|
480
|
|
Poisson's
Ratio
(μ)
|
-
|
0.20
|
|
Bending
Strength
|
per
DIN
52292
|
25
N/mm2
|
|
전기적
성질
|
Dielectric
Constant
(κ)
|
1
Mhz
@
25°C
|
4.6
|
|
Dielectric
Loss
Factor
(tan
δ)
|
1
Mhz
@
25°C
|
37
x
10-4
|
|
Dieletric
Strength
(κ′)
|
23°C
|
16kV/mm
|
|
149°C
|
7kV/mm
|
|
160°C
|
1.8kV/mm
|
|
Volume
Resistivity
(log
ρ)
|
250°C
|
8.0
|
|
350°C
|
6.5
|
|
화학적
성질
|
Common
Reactants Weight
Loss
mg/cm2
|
0.02
n
NaOH,
6
hr
@
95°
C
|
0.16
|
|
0.02
n
H2SO4,
24
hr
@
95°
C
|
<
0.01
|
|
H2O,
24
hr
@
95°
C
|
<
0.01
|
|
5%
NaOH,
6
hr
@
95°
C
|
1.1
|
|
5%
HCl,
24
hr
@
95°
C
|
<
0.01
|
|
0.02
Na2CO3,
6
hr
@
95°
C
|
0.16
|
|
10%
HF,
20
min
@
23°
C
|
1.1
|
|
10%
NH4F*HF,
20
min
@
23°
C
|
0.14
|
|
|
|
|
|
|
|
|
Glass
Name
|
Working
Temp
|
Max
Temp
|
Thermalshock
Resistmc
|
|
Normal
Sodalime
|
220
|
250
|
170
|
|
Pyrex
|
430
|
490
|
304
|
|
|
|
|
Chemical
Composition
of
Borofloat
33
and
Pyrex
(Corning7740)
|
|
|
SiO2
|
B2O3
|
Na2O3
|
K2O
|
Al2O3
|
|
Borofloat33
|
80
|
13
|
3.5
|
1
|
2.5
|
|
Pyrex
|
81
|
13
|
4
|
-
|
2
|
|
|
|
|
Physical
Properties
of
Borofloat
33
and
Pyrex
(Corning7740)
|
|
Properties
|
Borofloat33
|
Pyrex
|
|
Density(g/cm3)
|
2.2
|
2.2
|
|
Transformation
Temperature
in
°
C
|
525
|
528
|
|
Strain
Point
T
(log
h=14.5)
|
619
|
-
|
|
Softening
Point
T
(log
h=7.8)
|
820
|
-
|
|
Working
Point
T
(log
h=4.0)
|
1270
|
1270
|
|
Maximum
Use
Temperature
in
°
C
Short
term/Long
Term
|
500/450
|
290/260
|
|
Transform
Temperature
in
°
C
|
630
|
-
|
|
Linear
thermal
expansion
Coefficient
α
in
°
C
|
3.25
X
10E-8
|
3.25
X
10E-8
|
|
|
|
|
Sodalime 특성
|
|
Specific
Gravity
|
2.53
|
-
|
|
Modulus
of
Elasticity
(Young's)
|
7.2x1010
Pa
|
(10.4x106
psi)
|
|
Modulus
of
Rigidity
(Shear)
|
3.0x1010
Pa
|
(4.3
x
106
psi)
|
|
Bulk
Modulus
|
4.3x1010
Pa
|
(6.18
x
106
psi)
|
|
Poisson's
Ration
|
0.23
|
-
|
|
Density
|
2530
kg/m3 (2.47
g/cc)
|
(158
ib/ft3)
|
|
Coefficient
of
Thermal
Stress
|
0.62
mPa/°
C
|
(50
psi/°
F
)
|
|
Thermal
Conductivity
|
0.937
W.m/m2
°
C
|
(6.5
btu.in/hr°
F.ft2)
|
|
Specific
Heat
|
0.21
|
-
|
|
Coefficient
of
Linear
Expansion
|
8.9
x
10-6
strain/°
C
|
(4.9
X
10-6
strain/°
F)
|
|
Hardness (Moh's
Scale)
|
5
to
6
|
-
|
|
Refractive
Index
(Sodium
D
line)
|
1.523
|
-
|
|
(1um)
|
1.511
|
-
|
|
(2um)
|
1.499
|
-
|
|
Softening
Point
|
1340
°
F
(726°
C)
|
-
|
|
Annealing
Point
|
1015
°
F
(546°
C)
|
-
|
|
Strain
Point
|
957
°
F
(473
°
C)
|
-
|
|
Emissivity
at
75
°
F
|
0.84
|
-
|
|
Loss
Tangent
%
|
0.900
|
-
|
|
Volume
Resistivity
ohm.cm
250°
C
|
6.40
|
-
|
|
|
|
|
|
|
|
|
Glass
Name
|
Working
Temp
|
Max
Temp
|
Thermalshock
Resistmc
|
|
Normal
Sodalime
|
220
|
250
|
170
|
|
Pyrex
|
430
|
490
|
304
|
|
|
|
|
Corning
1737
특성
|
|
Mechanical
|
Metric
|
English
|
|
Density(20℃,68℉)
|
2.54g/㎤
|
158.6lb/ft3
|
|
Young's
Modulus
|
7.14*103kg/㎟
|
10.15*106psi
|
|
Poisson's
Ratio
|
0.22
|
0.22
|
|
Shear
Modulus
|
2.88*103kg/㎟
|
4.1*106psi
|
|
Viscosity
|
|
WorkingPoint(104poises)
|
1312℃
|
2394℉
|
|
SofteningPoint(107.6
poises)
|
975℃
|
1787℉
|
|
Annealing
Point(1013poises)
|
721℃
|
1330℉
|
|
Strain
Point
(1014.5
poises)
|
666℃
|
1231℉
|
|
Thermal
Expansion
|
|
Expansion
|
37.6*10-7/℃
|
21*10-7/℉
|
|
Room
Temperature
to
setting
Point
|
42.0*10-7/℃
|
23.3*10-7/℉
|
|
Optical
|
|
Birefringence
Constant
|
333nm/cm
kg/㎟
|
-
|
|
Electrical
|
|
Log10
Volume
Resistivity
|
(250℃,428℉)-13.5
|
(350℃.662℉)-11.4
|
|
-
|
(500℃,932℉)-9.3
|
-
|
|
|
|
|
Refractive
Index
|
|
Wavelength
(nm)
|
435.8
|
480
|
486.1
|
546.1
|
589.3
|
643.8
|
656.3
|
|
Index
of
Refraction
|
1.529
|
1.525
|
1.5244
|
1.5207
|
1.5186
|
1.5166
|
1.516
|
|
