| ¡ß
X - axis Section
|
| Drive Method |
AC Servo Motor |
| Stroke |
650mm Max |
| Effective
Cut Stroke |
220mm |
| Cut Speed |
0.7~3000mm/sec |
| ¡ß
Y - axis Section |
| Drive Method |
Pulse Motor |
| Max Programmable
Stroke |
220mm |
| Index Speed |
30mm/sec |
Indexing
Method
Min Index Step |
Linear Scale Closed Loop System
0.001mm |
| Indexing
Accuracy |
Single Pitch 0.003mm
Cumulative Pitch 0.005mm/200mm |
| ¡ß
Z - axis Section |
| Drive Method |
Pulse Motor |
| Indexing
Method |
Rotary Encorder |
| Max Stroke |
25mm |
| Min Index |
0.002mm |
| ¡ß
¥È - axis Section |
| Drive Method |
AC Servo Motor |
| Rotation
Angle (end to end) |
150 ¢ª max |
| Indexing
Time |
2sec/90¢ª |
| Min Index
Angle |
1.62" |
| ¡ß
Spindle Section (High Frequency
Air Spindle) |
| Output |
800W |
| RPM |
3,000 ~ 60,000 |
| ¡ß
Spinner Section |
| Drive Method |
AC Direct Drive |
| RPM |
3,000rpm MAX |
| Wash/dry
Time |
999 Seconds Max |
| Wash ¡æ Rinse
¡æ Dry |
Programmable |
Accuracy
of Table Positioning
During Rotation |
¡¾ 1 ¢ª |
| ¡ß
Alignment Section |
| Alignment
Method |
CCD Camera Pattern Matching
System |
| Microscope |
Single Object Magnfication
(a b Selectable)
| |
Macro |
Micro |
| a |
2.66 X |
7.5 X |
| b |
7.08 X |
19.88 X |
With Auto Focus Mechanism |
| ¡ß
Handling Section |
| Loading/Unloading
Section |
Cross-Flow Arm System |
Number of
Cassettes Used
(Detting for pitch and Number of Workpieces Can Be Changed) |
Number of Cassettes 1 for Each
Loader/Unloader
8"¥Õ=1/4" , 26 Slots
3~6" ¥Õ = 3/16" , 25 Slots |
| ¡ß
Utilities |
| power Supply |
|
| (1) AC 200/220
V |
3 Phase 50/60 Hz (domestic)
5 KVA |
| (2) AC 200
~ 415V* |
3 Phase 50/60 Hz (Overseas)
5 KVA
Transformer Necessary |
| ¡ß
Water Pressure |
| Cooling Water
(tap Water) |
2Kg/§² 1.5 Liters/Min |
| Cutting Water
(D.I Water) |
3 kg/§² 5 Liters/Min |
| Air Pressure |
5.5kgf/§² ¤ýG 440 Liters/Min |
| N |
5.5kgf/§² ¤ýG - AT Max.
use 565 liters/min |
